The 75th JSAP Autumn Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[19p-A12-1~16] Nanocarbon Technology

Fri. Sep 19, 2014 1:15 PM - 5:45 PM A12 (E301)

3:15 PM - 3:30 PM

[19p-A12-8] Thermodynamic Analysis of β-Ga2O3 Growth by Halide Vapor Phase Epitaxy

○(D)Kazushiro Nomura1, Ken Goto2, Rie Togashi1, Hisashi Murakami1, Yoshinao Kumagai1, Akito Kuramata2, Shigenobu Yamakoshi2, Akinori Koukitu1 (Tokyo Univ. of Agri. and Tech.1, Tamura Corporation2)

Keywords:酸化ガリウム