The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.1 X-ray technologies

[19p-A13-1~14] 7.1 X-ray technologies

Fri. Sep 19, 2014 1:15 PM - 5:00 PM A13 (E304)

2:15 PM - 2:30 PM

[19p-A13-5] Dynamics of laser-irradiated tin droplet II

○Atsushi Sunahara1, Katsunobu Nishihara2, Akira Sasaki3 (ILT1, ILE Osaka Univ.2, JAEA KANSAI APRI3)

Keywords:EUV光源,半導体リソグラフィー