Efficient generation of EUV light from CO<sub>2</sub> laser driven Sn plasma

Hiraku Matsukuma

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Oral presentation

07. Beam Technology and Nanofabrication » 7.1 X-ray technologies

[19p-A13-1~14] 7.1 X-ray technologies

Fri. Sep 19, 2014 1:15 PM - 5:00 PM A13 (E304)

2:45 PM - 3:00 PM

△ [19p-A13-7] Efficient generation of EUV light from CO₂ laser driven Sn plasma

^○(PC)Hiraku Matsukuma¹, Kensuke Yoshida¹, Tatsuya Hosoda¹, Shinsuke Fujioka¹, Akifumi Yogo¹, Hiroaki Nishimura¹, Eiji Sato², Toshihiro Somekawa³, Tatsuya Yanagida⁴ (Osaka Univ.¹, NAT², ILT³, Giga Photon inc.⁴)

Keywords:EUV光源

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Presentation information

[19p-A13-1~14] 7.1 X-ray technologies

△ [19p-A13-7] Efficient generation of EUV light from CO2 laser driven Sn plasma

△ [19p-A13-7] Efficient generation of EUV light from CO₂ laser driven Sn plasma