The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.7 Vacuum nanoelectronics and electron sources

[19p-A14-1~16] 7.7 Vacuum nanoelectronics and electron sources

Fri. Sep 19, 2014 1:00 PM - 5:15 PM A14 (E305)

4:30 PM - 4:45 PM

[19p-A14-14] Fabrication of Mo Spindt-type field emitters by using double-layered photoresist

○Masayoshi Nagao1, Shunichi Yoshizawa1, Bunpei Masaoka1 (AIST1)

Keywords:フィールドエミッタアレイ,スピント型,イメージセンサ