[19p-A4-1~6] Innovation in R&D of the Flexible Electronics -Toward the Inorganic Flexible Devices-

▲ [19p-A4-2] Plasma Irradiation Technology for Direct Bonding of Plastic Films
– Contact Angle and Bonding Strength

^○Miyoshi Yokura^1,2, Toshiki Mori¹, Kenichi Uehara¹, Yukiko Izumi³, Kumiko Takahashi³, Shigehisa Tomita³, Hiroaki Nishikawa⁴, Satoru Kaneko⁵, Yoshinobu Nakamura⁶, Tamio Endo¹ (Mie Univ.¹, APC², Toray Research Center³, Kinki Univ.⁴, Kanagawa Ind. Tech.Center⁵, University of Tokyo⁶)

Keywords:plasma,direct bonding,plastic films