The 75th JSAP Autumn Meeting, 2014

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Oral presentation

09. Applied Materials Science » 9.3 Nanoelectronics

[19p-A7-1~13] 9.3 Nanoelectronics

Fri. Sep 19, 2014 1:15 PM - 4:45 PM A7 (E206)

4:15 PM - 4:30 PM

[19p-A7-12] In-Situ Thermal Measurements of Graphite-Based Thin-Film Heater

○Takanari Saito1, Misae Matayoshi1, Jun-ichi Shirakashi1 (Tokyo Univ. Agr. & Tech.1)

Keywords:グラファイト,薄膜ヒータ,温度観察