The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

Code-sharing session » 6.1/9.1 Code-sharing session

[19p-A9-1~15] 6.1/9.1 Code-sharing session

Fri. Sep 19, 2014 1:15 PM - 5:45 PM A9 (E208)

4:30 PM - 4:45 PM

△ [19p-A9-11] The Wet Etching Technique of 6 inch KNN wafer by EDTA

○Fumimasa Horikiri1, Kenji Shibata1, Kazufumi Suenaga1, Kazutoshi Watanabe1, Masaki Noguchi1 (Hitachi Metals1)

Keywords: 圧電,薄膜,エッチング