Fabrication of multiple-degree-of-freedom Piezoelectric MEMS Vibration Energy Harvesters using BiFeO<sub>3</sub> thin films

Presentation information

Oral presentation

Code-sharing session » 6.1/9.1 Code-sharing session

Fri. Sep 19, 2014 1:15 PM - 5:45 PM A9 (E208)

5:15 PM - 5:30 PM

^○Kento Kariya¹, Takeshi Yoshimura¹, Shuichi Murakami², Norifumi Fujimura¹ (Osaka Pref. Univ.¹, TRI-Osaka²)

Keywords:BiFeO3,振動発電,エナジーハーベスティング