[19p-A9-1~15] 6.1/9.1 Code-sharing session

△ [19p-A9-7] Analysis of Electrical Properties and Crystal Structure for (Hf,Zr)O2 Thin Films

^○Takahisa Shiraishi¹, Kiliha Katayama¹, Tatsuhiko Yokouchi¹, Takao Shimizu¹, Takahiro Oikawa¹, Hiroshi Uchida², Hiroshi Funakubo¹ (Tokyo Institute of Technology¹, Sophia University²)

Keywords:ferroelectricity,(Hf,Zr)O2