[19p-B1-1~9] 17.2 Structural control and process

[19p-B1-1] CMP process development for selectively-grown carbon nanotubes in via hole

^○Ban Ito¹, Makoto Wada¹, Tatsuro Saito¹, Daisuke Nishide¹, Takashi Matsumoto¹, Masayuki Katagiri¹, Masahito Watanabe¹, Naoshi Sakuma¹, Akihiro Kajita¹, Tadashi Sakai¹ (LEAP¹)

Keywords:Carbon nanotube