[19p-PA2-1~6] 7.5 Particle/photon-beam-induced surface reactions

[19p-PA2-1] Fabrication of Au/Si Composite Surface Nanostructure using Nanosecond Pulsed Laser Irradiation

^○Yutaka Yoshida^1,2, Seiichi Watanabe², Ko Onishi^3,1, Yasutaka Matsuo³, Takahiko Kato⁴ (Hokkaido Univ. CRIS¹, Hokkaido Univ. CAREM², Hokkaido Univ. RIES³, Hitachi Ltd.⁴)

Keywords:ナノ秒パルスレーザー,複合表面ナノ構造