[19p-PB6-1~26] 15.4 III-V-group nitride crystals

▲ [19p-PB6-23] Detail Study on Lattice Deformation and Recovery of GaN by Mg-ion-implantation and the Subsequent Thermal Annealing

^○(DC)Zheng Sun¹, Marc Olsson¹, Di Lu¹, Tsutomu Nagayama³, Tetsuya Watanabe⁴, Yoshio Honda¹, Hiroshi Amano^1,2 (Nagoya Univ.¹, Akasaki Research Center², Nissin Ion Equipment Co., Ltd.³, Nissin Electric Co., Ltd.⁴)

Keywords:GaN