The 75th JSAP Autumn Meeting, 2014

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Poster presentation

15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[19p-PB7-1~6] 15.8 Crystal evaluation, impurities and crystal defects

Fri. Sep 19, 2014 4:00 PM - 6:00 PM PB7 (Gymnasium2)

ポスター掲示時間16:00～18:00(PB7会場)

4:00 PM - 6:00 PM

△ [19p-PB7-1] Evaluation by TEM of misfit dislocations in silicon epitaxial wafers

○Kota Kawamoto1, Tetsuya Nagai2, Kengo Noami2, Katsuhiko Nakai2, Tousirou Futagi2, Hidekazu Yamamoto1 (Chiba Inst. of Tech.1, Nippon Steel & Sumikin Tech.2)

Keywords:エピタキシャルウエハ,ミスフィット転位,透過電子顕微鏡