[19p-S8-1~5] 8.1 Plasma production and control

△ [19p-S8-2] Optimization of Cylindrical Cavity Excitation for Large-Area Microwave Plasma Generation

^○(B)Yuichi Hasegawa¹, Daisuke Ogawa¹, Keiji Nakamura¹, Satoru Kobayashi², Hideo Sugai³ (Chubu Univ¹, Applied Materials², NISRI³)

Keywords:マイクロ波プラズマ,円筒キャビティ,FDTDシミュレーション