[19p-S9-1~5] 8.3 Plasma deposition of thin film and surface treatment

[19p-S9-1] Plasma indicator(1):Metachromasy of inorganic oxide under a plasma and plasma diagnostication

^○Yu Yamakawa^1,2, Hirokazu Miyazaki¹, Kazuhiro Uneyama¹, Hiroshi Inoue¹, Masahiro Shimizu², Masayuki Nishi², Kazuyuki Hirao² (Sakura Color Products Corp.¹, Kyoto Univ.²)

Keywords:プラズマ診断,ラジカル,インジケータ