[19p-S9-1~5] 8.3 Plasma deposition of thin film and surface treatment

[19p-S9-3] Effect of Substrate Temperature when Exposing Gallium Nitride Film in Plasma

^○Daisuke Ogawa¹, Yoshitaka Nakano¹, Keiji Nakamura¹ (Chubu University¹)

Keywords:窒化ガリウム,誘導性プラズマ,フォトルミネッセンス