Composition of atomic nitrogen on SiC surface irradiated by remote nitrogen plasma: Effect of active species

Presentation information

Oral presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

Fri. Sep 19, 2014 1:15 PM - 2:30 PM S9 (S9)

2:00 PM - 2:15 PM

^○masaharu shimabayashi¹, kazuaki kurihara², koichi sasaki¹ (Hokkaido Univ.¹, Toshiba Corp.²)

Keywords:SiC,リモート窒素プラズマ