The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[20a-A13-1~8] 7.4 Nanoimprint

Sat. Sep 20, 2014 9:30 AM - 11:30 AM A13 (E304)

9:30 AM - 9:45 AM

[20a-A13-1] High-Temperature Nanoimprinting on Metal Films

○Harutaka Mekaru1 (AIST1)

Keywords:ナノインプリント,金属,再結晶