9:45 AM - 10:00 AM
[20a-A13-2] Inclination of Pattern’s Sidewalls by Laser Writing and Reflow Treatment
Keywords:レーザーリソグラフィー,リフロー,傾斜側壁
Presentation information
Oral presentation
07. Beam Technology and Nanofabrication » 7.4 Nanoimprint
[20a-A13-1~8] 7.4 Nanoimprint
Sat. Sep 20, 2014 9:30 AM - 11:30 AM A13 (E304)