The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[20a-A13-1~8] 7.4 Nanoimprint

Sat. Sep 20, 2014 9:30 AM - 11:30 AM A13 (E304)

10:30 AM - 10:45 AM

△ [20a-A13-5] Single-nano patterning on surfaces of glassy materials by thermal nanoimprint

○Tomoyuki Funabasama1, Yasuhisa Nozawa1, Geng Tan1, Masahiro Mita2, Satoru Kaneko1,3, Akifumi Matsuda1, Mamoru Yoshimoto1 (Tokyo Inst. of Tech.1, Kyodo Int'l Inc.2, Kanagawa Ind. Tech. Cent.3)

Keywords:熱ナノインプリント,ナノパターン