[20a-A19-1~12] 13.3 Si Process・Interconnect・MEMS・Integration

[20a-A19-1] Cleanroom-Free Minimal Air Circulation System for PLAD (Ⅲ)

^○Takashi Yajima¹, Iida Kenjiro^1,2, Masaharu Yasui¹, Sommawan Khumpuang^1,2, Hitoshi Maekawa^1,2, Shiro Hara^1,2 (MINIMAL¹, AIST²)

Keywords:minimal fab