The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[20a-A19-1~12] 13.3 Si Process・Interconnect・MEMS・Integration

Sat. Sep 20, 2014 9:00 AM - 12:15 PM A19 (E311)

9:00 AM - 9:15 AM

[20a-A19-1] Cleanroom-Free Minimal Air Circulation System for PLAD (Ⅲ)

Takashi Yajima1, Iida Kenjiro1,2, Masaharu Yasui1, Sommawan Khumpuang1,2, Hitoshi Maekawa1,2, Shiro Hara1,2 (MINIMAL1, AIST2)

Keywords:minimal fab