[20a-A20-1~15] 15.8 Crystal evaluation, impurities and crystal defects

[20a-A20-1] High sensitivity infrared absorption spectroscopy and infrared defect dynamics of silicon crystal (8) On irradiation induced intrinsic point defects and their clusters

^○Naohisa Inoue^1,5, Yasunori Goto², Hirofumi Seki³, Kaori Watanabe⁴, Yuichi Kawamura⁵ (Tokyo U. Agri. Technol.¹, Royota Motor Co.², Toray Research Center³, Systems Engineering Co.⁴, Osaka Pref. Univ.⁵)

Keywords:シリコン,赤外吸収,点欠陥