[20a-A20-1~15] 15.8 Crystal evaluation, impurities and crystal defects

△ [20a-A20-12] Proximity Gettering of Carbon Cluster Ion Irradiated Silicon Wafers -Hydrogen Diffusion Behavior and Influence on Defects Formation-

^○Ryosuke Okuyama¹, Takeshi Kadono¹, Takuro Iwanaga¹, Yoshihiro Koga¹, Hidehiko Okuda¹, Kazunari Kurita¹ (SUMCO¹)

Keywords:Gettering,欠陥,水素