Effect of Low Carbon Concentration on Bulk Carrier Lifetime in MCZ Silicon Crystal

Presentation information

Oral presentation

15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

Sat. Sep 20, 2014 9:00 AM - 1:00 PM A20 (E312)

9:30 AM - 9:45 AM

^○Mitsuo Higasa¹, Yuta Nagai¹, Satoko Nakagawa¹, Kazuhiko Kashima¹ (Global Wafers Japan Co.,Ltd.¹)

Keywords:シリコン,ライフタイム,炭素