[20a-A22-1~6] 11.4 Analog application and its related technologies

[20a-A22-6] Development of Kinetic Inductance Detector with Ti/TiN Multilayer Film

^○Yoshitarou Nishimura¹, Satoru Mima², Masato Naruse¹, Tohru Taino¹, Hiroaki Myoren¹, Chiko Otani^2,3, Osamu Tajima⁴ (Saitama Univ.¹, RIKEN², Tohoku Univ.³, KEK⁴)

Keywords:超伝導,窒化チタン,力学インダクタンス検出器