The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[20a-A25-6~13] 16.2 Processing technologies and devices

Sat. Sep 20, 2014 10:30 AM - 12:30 PM A25 (E318)

10:30 AM - 10:45 AM

[20a-A25-6] [Young Scientist Oral Presentation Award Speech](15min.)
Low-Temperature Transfer of SOI Layer with Midair Cavity by Meniscus Force and Its Application to Single-Crystalline Silicon TFT Fabrication on a Flexible Substrate

Kohei Sakaike1,2, Muneki Akazawa1, Yoshitaka Kobayashi1, Shogo Nakamura1, Seiichiro Higashi1,3 (Grad. School of AdSM, Hiroshima Univ.1, JSPS Research Fellow PD2, RNBS, Hiroshima Univ.3)

Keywords:フレキシブル,転写,シリコン