Evaluation of Ag thermal diffusion depth in Mg<sub>2</sub>Si crystals by sputter etching

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials

Sat. Sep 20, 2014 9:00 AM - 11:45 AM A27 (N302)

9:00 AM - 9:15 AM

^○Nobuhiko Hori¹, Fumitaka Esaka², Haruhiko Udono¹ (Graduate School of Sci. & Eng., Ibaraki Univ.¹, JAEA²)

Keywords:半導体,熱拡散