[20a-B3-1~7] 17.1 Growth technology

△ [20a-B3-3] Synthesis and characterization of MoxW1-xS2 atomic layers by using thin-film sulfurization

^○Yu Kobayashi¹, Shohei Mori¹, Yutaka Maniwa¹, Yasumitsu Miyata^1,2 (Tokyo Metropolitan Univ.¹, JST-PRESTO²)

Keywords:遷移金属ダイカルコゲナイド,合成,原子層