[20a-S9-1~11] 8.5 Plasma nanotechnology

[20a-S9-10] Effect on DLC film composition for fabrication of DLC nanostructures by O2 plasma etching

^○Toru Harigai¹, Yuki Yasuoka¹, Hiroshi Furuta^1,2, Akimitsu Hatta^1,2 (Kochi Univ. Technol.¹, Center for Nanotechnol., Research Inst., Kochi Univ. Technol.²)

Keywords:DLC,エッチング,ナノ構造