haracterization of Binary Random Phase Array Fabricated by Nanoimprint Lithography

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Sat. Sep 20, 2014 1:00 PM - 3:00 PM A13 (E304)

2:45 PM - 3:00 PM

^○Yoshitaka Nakamura¹, Yasuhisa Inada¹, Akira Hashiya¹, Taku Hirasawa¹ (Panasonic¹)

Keywords:ナノインプリント,Nanoimprint