[20p-S9-1~5] 8.5 Plasma nanotechnology

△ [20p-S9-1] Fabrication of graphene films using microwave plasma-enhanced CVD

^○(M1)Masakazu Tomatsu¹, Yohei Kashima², Mineo Hiramatsu³, Hiroki Kondo⁴, Masaru Hori⁵ (Meijo Univ¹, Meijo Univ², Meijo Univ³, Nagoya Univ⁴, Nagoya Univ⁵)

Keywords:グラフェン