4:30 PM - 4:45 PM
[17p-F3-10] Two-dimensional Analysis of Capacitive-coupled RF Discharge using Finite Element Method
Keywords:Capacitively coupled plasma, 2D finite elment model, COMSOL Multiphysics
Presentation information
Oral presentation
08. Plasma Electronics » 8.1 Plasma production and control
[17p-F3-1~16] 8.1 Plasma production and control
Mon. Mar 17, 2014 2:00 PM - 6:15 PM F3 (F301)