High Temperature Substrate Heaters/ MiniLab series Flexible Deposition Systems/ MiniLab series High Temperature Furnace/ nanoPVD, nanoCVD, nanoEtch BenchTop R&D systems
SSPO(Solid State Power Oscillator), 915MHz, 300W. , SSPO, 2.45GHz, 50W to 2kW. , SSPO, 5.8GHz, 100W. , Microwave Power Sources and Systems which consists of SSPOs for plasma and heating applications.