Oral presentation
13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology
Sun. Sep 13, 2015 1:15 PM - 5:15 PM 1C (135)
座長:鉄田 博(日新イオン機器),上野 和良(芝浦工大)
△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation
1:15 PM - 1:30 PM
〇Norio Umeyama1,2, Yuji Kitayama2, Haruki Toonoe2, Junko Kazusa2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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1:30 PM - 1:45 PM
〇Fumito Imura1,2, Kazuhiro Koga1,2, Norio Umeyama1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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1:45 PM - 2:00 PM
〇kazushige sato1, Haruki Toonoe1, Takashi Chiba1,3, Masao Terada1,3, Shinichi Ikeda1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.Minimal Fab Development Association, 2.AIST, 3.Sakaguchi E.H VOC Corp)
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2:00 PM - 2:15 PM
〇Kazuhiro Koga1,2, Fumito Imura1,2, Yuji Kitayama2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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2:15 PM - 2:30 PM
〇NING LI1, HITOSHI HABUKA1, TAKANORI MIKAHARA2, SHIN-ICHI IKEDA2,3, YUUKI ISHIDA2,3, SHIRO HARA2,3 (1.Yokohama National Univ., 2.MINIMAL, 3.AIST)
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2:30 PM - 2:45 PM
〇Noriko Miura1, Yuuki Ishida1,2, Takahiro Ito3, Takanori Mikahara1,2, Shinichi Ikeda1,2, Hitoshi Habuka4, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.ORIENTAL MOTER, 4.Yokohama National Univ.)
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2:45 PM - 3:00 PM
〇Akihiko Kato1,3, Lan Kou2, Hisato Ogiso1,2, Shizuka Nakano1,2, Yuuki Yabuta1,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST, 3.Seinan)
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3:00 PM - 3:15 PM
〇JUNKO KAZUSA1, Kazuhiro Koga1,2, Norio Umeyama1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
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Break (3:15 PM - 3:30 PM)
3:30 PM - 3:45 PM
〇yasuhide higashino1, Fumito Imura1,2, Michihiro Inoue2, Arami Saruwatari1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
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3:45 PM - 4:00 PM
〇Yuuji Kitayama1, Syuuji Okuda1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
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4:00 PM - 4:15 PM
〇Shuuji Okuda1, Sho Takeuchi2, Yoshihisa Sensu2, Takahiro Ito3, Sommawan Khumpuang4, Shiro Hara4 (1.MINIMAL, 2.LTJ, 3.ORIENTAL MOTOR, 4.AIST)
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4:15 PM - 4:30 PM
〇Hiroyuki Tanaka1,2, Ogiso Hisato1,2, Nakano Shizuka1,2, Hayami Toshihiro2,3, Miyazaki Toshiya2,3, Tomisaka Kenichi2,3, Tezen Hisamitsu2,3, Khumpuang Sommawan1,2, Hara Shiro1,2 (1.AIST, 2.MINIMAL, 3.SPT)
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4:30 PM - 4:45 PM
〇HARUKI TONOE1, Naoko Tajima1,3, Toshiki Azuma2, Yoshinobu Nakura2, Kenjiro Iida1,3, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.MINIMAL, 2.YGK, 3.AIST)
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4:45 PM - 5:00 PM
〇naoko tajima1,2, Kenjiro Iida1,2, Kensei Ehara1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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5:00 PM - 5:15 PM
〇Takashi Yajima1,2, Masaharu Yasui1,2, Khumpuang Sommawan1,2, Hitoshi Maekawa1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
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