The 76th JSAP Autumn Meeting, 2015

Session information

Oral presentation

8 Plasma Electronics » 8.8 プラズマエレクトロニクス分科内招待講演

[13p-1F-1~2] 8.8 プラズマエレクトロニクス分科内招待講演

Sun. Sep 13, 2015 1:00 PM - 2:30 PM 1F (Reception Hall 1)

座長:杤久保 文嘉(首都大)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

1:45 PM - 2:30 PM

〇Peter L. G. Ventzek1, H. Ueda2, Y. Kobayashi2, T. Iwao2, K. Ishibashi2, A. Ranjan3, M. Wang3, A. Suzuki2, H. Higuchi2, B. Lane1, R. Upadhyay4, G.S. Hwang5, L. Raja5, A. Koshiishi6 (1.Tokyo Electron America Inc., 2.Tokyo Electron Ltd., 3.Tokyo Electron Tech. Center America, 4.Esgee Tech., 5.Univ. of Texas at Austin, 6.Tokyo Electron Miyagi Ltd.)

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