[14a-1C-1~10] 13.4 Si wafer processing /MEMS/Integration technology

Mon. Sep 14, 2015 9:00 AM - 11:45 AM 1C (135)

座長:佐々木実(豊田工大),石井仁(豊橋技科大)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:00 AM - 9:15 AM

[14a-1C-1] [Young Scientist Presentation Award Speech] Characterization of Piezo-Structure with Polymer and Pb(Zr,Ti)O₃ Thin Film

〇Takashi Okubo¹, Ryo Sano¹, Maya Shima¹, Kensuke Kanda¹, Takayuki Fujita¹, Kazusuke Maenaka¹ (1.Univ. of Hyogo)

9:15 AM - 9:30 AM

[14a-1C-2] Three-Dimensional Integration of Pulse-Frequency-Modulation A/D Converters

〇Masahide Goto¹, Kei Hagiwara¹, Yoshinori Iguchi¹, Hiroshi Ohtake¹, Takuya Saraya², Masaharu Kobayashi², Eiji Higurashi², Hiroshi Toshiyoshi², Toshiro Hiramoto² (1.NHK STRL, 2.Univ. of Tokyo)

9:30 AM - 9:45 AM

△ [14a-1C-3] Vertically integrated flexible CMOS circuit with temperature sensor

〇Wataru Honda¹, Shingo Harada¹, Ishida Shohei¹, Takayuki Arie¹, Seiji Akita¹ (1.Osaka Pre. Univ.)

9:45 AM - 10:00 AM

[14a-1C-4] Q factor enhancement of a carbon nanomechanical resonator by fluorine surface modification

〇Reo Kometani¹, Takumi Miyakoshi¹, Etsuo Maeda¹ (1.The Univ. of Tokyo)

10:00 AM - 10:15 AM

[14a-1C-5] Isolated Voltage Sensor Using Gap-Closing Type Electrode

Naoki Nobunaga¹, Shinya Kumagai¹, Hiroki Ishihara², Makoto Ishii², 〇Minoru Sasaki¹ (1.Toyota Tech. Inst., 2.Yazaki Corp.)

Break (10:15 AM - 10:30 AM)

10:30 AM - 10:45 AM

[14a-1C-6] Wavelength selective silicon-on-insulator diode uncooled infrared focal plane array

〇DAISUKE FUJISAWA¹, OGAWA SHINPEI¹, HATA HISATOSHI¹, UETSUKI MITSUHARU¹, MISAKI KOJI¹, TAKAGAWA YOUSUKE², KIMATA MASAFUMI² (1.Mitsubishi Electric Corp., 2.Ritsumeikan Univ.)

10:45 AM - 11:00 AM

[14a-1C-7] Mushroom plasmonic metamaterial IR absorbers for wideband uncooled infrared sensors with advanced functions

〇SHIMPEI OGAWA¹, DAISUKE FUJISAWA¹, HISATOSHI HATA¹, MASAFUMI KIMATA² (1.Mitsubishi Electric Corp., 2.Ritsumeikan Univ.)

11:00 AM - 11:15 AM

[14a-1C-8] Process Issues in Optical Integrated Circuits using Silicon Photonics Technology (III)
Fabrication of Low-loss Waveguides with Low LER and Clean Surface

〇Tsuyoshi Horikawa^1,2, Daisuke Shimura², Seok-Hwan Jeong², Masatoshi Tokushima², Keizo Kinoshita², Tohru Mogami² (1.AIST, 2.PETRA)

11:15 AM - 11:30 AM

[14a-1C-9] Process Issues in Optical Integrated Circuits using Silicon Photonics Technology (IV)
Developments on Ge/Si Selective Epitaxial Growth Processes for Photodetector

〇Keizo Kinoshita¹, Shigekazu Okumura¹, Junichi Fujikata¹, Tsuyoshi Horikawa^1,2, Tohru Mogami¹ (1.PETRA, 2.AIST)

11:30 AM - 11:45 AM

[14a-1C-10] PDMS-made Bacteria Trapping Chip Using Beads Ⅳ -Optical response of Legionella by ultraviolet light irradiation-

〇Yusuke Nishimura¹, Makoto Ishida¹, Kazuaki Sawada¹, Hiromu Ishii¹, Katsuyuki Machida^2,3, Kazuya Masu², Changle Wang⁴, Ken-ichiro Iida⁴, Mitsumasa Saito⁴, Shin-ichi Yoshida⁴ (1.Toyohashi Univ. of Tech, 2.Tokyo Inst. of Tech, 3.NTT-AT, 4.Graduate School of Medical Sciences, Kyusyu Univ.)

Session information