Oral presentation
13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology
Mon. Sep 14, 2015 1:15 PM - 5:30 PM 1C (135)
座長:中村 友二(富士通研),筑根 敦弘(大陽日酸)
△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation
1:15 PM - 1:30 PM
〇Norio Ishitsuka1, Noriyuki Sakuma1, Yasuo Onose2 (1.Hitachi R&D Group, 2.Hitachi Automotive Systems)
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1:30 PM - 1:45 PM
〇Takamitsu Tochino1, Tatsuya Iida1, Masaaki Yasuda1, Hiroaki Kawata1, Yoshihiko Hirai1 (1.Osaka Pref. Univ.)
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1:45 PM - 2:00 PM
〇Yohei Sugawara1, Hisashi Kino2, Takafumi Fukushima1,3, Kang-Wook Lee3, Mitsumasa Koyanagi3, Tetsu Tanaka1,4 (1.Dept. of Bioengineering and Robotics, Tohoku Univ., 2.FRIS, Tohoku Univ., 3.NICHe, Tohoku Univ., 4.Dept. of Biomedical Engineering, Tohoku Univ.)
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2:00 PM - 2:15 PM
〇SEIYA TANIKAWA1, HISASHI KINO2, TAKAFUMI FUKUSHIMA1, KOYANAGI MITSUMASA3, TETSU TANAKA1,4 (1.Dept. of Bioengineering and Robotics, Tohoku Univ., 2.FRIS, Tohoku Univ., 3.NIChe, Tohoku Univ., 4.Dept. of Biomedical Engineering, Tohoku Univ.)
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2:15 PM - 2:30 PM
〇(M1)kenya nishio1, Toshiyuki Sanada1, Akira Hukunaga2, Hirokuni Hiyama2 (1.Shizuoka Univ., 2.Ebara Co.)
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2:30 PM - 2:45 PM
〇(DC)Taewoong Kim1, Takeshi Momose1, Tsunoda Takaaki2, Takayuki Moriwaki2, Takashi Nakagawa2, Yukihiro Shimogaki1 (1.The Univ. of Tokyo, 2.CANON ANELVA CORPORATION)
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2:45 PM - 3:00 PM
〇Ryutaro Suda1, Mamiko Yagi1, Akira Kojima1, Jun-ichi Shirakashi1, Nobuyoshi Koshida1 (1.Tokyo Univ. of Agri. & Technol.)
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3:00 PM - 3:15 PM
〇XU ZHANG1, Shuichiro Hashimoto1, Kohei Takei1, Jing Sun1, Taiyu Xu1, Shuhei Asada1, Toshihiro Usuda1, Motohiro Tomita1,2,3, Ryosuke Imai3, Atsushi Ogura3, Takashi Matsukawa4, Meishoku Masashihara4, Takanobu Watanabe1 (1.Waseda Univ., 2.JSPS Res. Fellow PD, 3.Meiji Univ., 4.AIST)
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Break (3:15 PM - 3:30 PM)
3:30 PM - 3:45 PM
〇Tomihiro Sonegawa1, Noriaki Oyama1 (1.Univ. of the ryukyus)
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3:45 PM - 4:00 PM
〇NOBUHIRO TAKAHASHI1, KAKIMOTO AKIMOTO1, OKADA MITSUHIRO1, KOMORI KATSUHIKO1 (1.Tokyo Electron Tohoku)
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4:00 PM - 4:15 PM
〇Yuji Okamoto1,2, Fatima Zohra Dahmani3, Daiki Tsutsumi4, Takamasa Ishigaki4, Masatomo Sumiya1 (1.NIMS, 2.Tsukuba Univ., 3.USTO-MB, 4.Hosei Univ.)
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4:15 PM - 4:30 PM
〇Kenji Itaka1, Masatomo Sumiya2, Takuya Hashimoto3 (1.Hirosaki Univ., 2.NIMS, 3.Nihon Univ.)
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4:30 PM - 4:45 PM
〇AYAMI YAMADA1, MISAKO MATSUI1, HITOSHI HABUKA1 (1.Yokohama Nat. Univ.)
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4:45 PM - 5:00 PM
〇kento miyazaki1, Ayumi Saito1, Misako Matsui1, Hitoshi Habuka1 (1.Yokohama Nat. Univ)
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5:00 PM - 5:15 PM
Ayumi Sakura1, Ayumi Saito1, 〇Hitoshi Habuka1 (1.Yokohama Nat. Univ.)
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5:15 PM - 5:30 PM
〇Ayumi Saito1, Ayumi Sakurai1, Hitoshi Habuka1 (1.Yokohama Nat. Univ.)
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