9:00 AM - 9:15 AM
〇Yuji Kasashima1, Fumihiko Uesugi1 (1.AIST)
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Tue. Sep 15, 2015 9:00 AM - 12:15 PM 2Q (231-1)
座長:辰巳 哲也(ソニー),石川 健治(名大)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
9:00 AM - 9:15 AM
〇Yuji Kasashima1, Fumihiko Uesugi1 (1.AIST)
9:15 AM - 9:30 AM
〇Kousuke Fukuchi1, Shigeru Nakamoto1, Satomi Inoue1 (1.Hitachi High-Technologies)
9:30 AM - 9:45 AM
〇(M2)Jumpei Sato1, Tatsuya Hirano1, Yusuke Kubota2, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ., 2.TOKYO ELECTRON LTD.)
9:45 AM - 10:00 AM
〇Kazunori Shinoda1, Miyako Matsui1, Kenji Maeda1, Yutaka Kudou2, Tadamitsu Kanekiyo2, Masaru Izawa2, Kenji Ishikawa3, Masaru Hori3 (1.Hitachi, 2.Hitachi High-Tech, 3.Nagoya Univ.)
10:00 AM - 10:15 AM
〇Nobuya Miyoshi1, Hiroyuki Kobayashi1, Kazunori Shinoda1, Kenji Maeda1, Yutaka Kudo2, Tadamitsu Kanekiyo2, Masaru Izawa2 (1.Hitachi, 2.Hitachi High-Tech)
10:15 AM - 10:30 AM
〇Yusuke Fukunaga1, Takayoshi Tsutsumi1, Keigo Takeda1, Kenji Ishikawa1, Hiroki Kondo1, Makoto Sekine1, Masaru Hori1 (1.Nagoya Univ.)
Break (10:30 AM - 10:45 AM)
10:45 AM - 11:00 AM
〇Nobuya Nakazaki1, Yoshinori Takao1, Koji Eriguchi1, Kouichi Ono1 (1.Kyoto Univ.)
11:00 AM - 11:15 AM
〇Kazuhito Furumoto1, Kazuhisa Matsuda1, Toshiyuki Sasaki1, Mitsuhiro Omura1, Itsuko Sakai1, Hisataka Hayashi1 (1.Toshiba.Corp.)
11:15 AM - 11:30 AM
〇HU LI1, Kazuhiro Karahashi1, Masanaga Fukasawa2, Kazunori Nagahata2, Tetsuya Tatsumi2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Sony)
11:30 AM - 11:45 AM
〇Yuichi Murakami1, Michiro Isobe1, Keita Miyake1, Masanaga Fukasawa2, Kazunori Nagahata2, Tetsuya Tatsumi2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Sony)
11:45 AM - 12:00 PM
〇Tomohiro Kubota1, Yoshiyuki Kikuchi2, Toshihisa Nozawa2, Hiroshi Ito3, Momoji Kubo3, Seiji Samukawa1,4 (1.IFS, Tohoku Univ., 2.Tokyo Electron Ltd., 3.IMR, Tohoku Univ., 4.WPI-AIMR, Tohoku Univ.)
12:00 PM - 12:15 PM
〇Masashi Seki1, Chiaki Tanuma2 (1.Toshiba TEC Corp., 2.Hosei Univ.)
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