9:30 AM - 11:30 AM
〇Daisuke Yamane1,4, Toshifumi Konishi2, Hiroshi Toshiyoshi3,4, Kazuya Masu1,4, Katsuyuki Machida1,2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)
Poster presentation
13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology
Tue. Sep 15, 2015 9:30 AM - 11:30 AM PB4 (Shirotori Hall)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
9:30 AM - 11:30 AM
〇Daisuke Yamane1,4, Toshifumi Konishi2, Hiroshi Toshiyoshi3,4, Kazuya Masu1,4, Katsuyuki Machida1,2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)
9:30 AM - 11:30 AM
〇Toshifumi Konishi1, Daisuke Yamane2,4, Motohiro Takayasu2,4, Hiroyuki Ito2,4, Shiro Dosho2,4, Noboru Ishihara2,4, Kazuya Masu2,4, Hiroshi Toshiyoshi3,4, Katsuyuki Machida1,2,4 (1.NTT-AT, 2.Tokyo Tech., 3.Univ. of Tokyo, 4.JST-CREST)
9:30 AM - 11:30 AM
〇TERUAKI SAFU1, Toshifumi Konishi1, Takaaki Matsushima1, Daisuke Yamane2,4, Hiroshi Toshiyoshi3,4, Masato Sone2,4, Kazuya Masu2,4, Katsuyuki Machida1,2,4 (1.NTT-AT Corp, 2.Tokyo Tech, 3.The Univ. of Tokyo, 4.JST-CREST)
9:30 AM - 11:30 AM
〇SHIMPEI OGAWA1, DAISUKE FUJISAWA1, MASAFUMI KIMATA2 (1.Mitsubishi Electric Corp., 2.Ritsumeikan Univ.)
9:30 AM - 11:30 AM
〇kei nisikawa1, Yoshio Uhara1, Masatoshi Itho1, Sigeru Saito1 (1.Tokyo Univ. of Science)
9:30 AM - 11:30 AM
〇Naoki Azuma1, Misaki Ohwada1, Takumi Abe1, Tsutomu Nakada2, Makoto Kubota2, Kazuyoshi Ueno1 (1.Shibaura Inst. Tech., 2.EBARA Corp.)
9:30 AM - 11:30 AM
〇Fumiaki Kurihara1, Hiroyuki Okada1, Shigeki Naka1 (1.Univ. of Toyama)
9:30 AM - 11:30 AM
〇Lien Mai1, Susumu Horita1 (1.JAIST)
9:30 AM - 11:30 AM
〇Yuya Nishimura1, Syota Nibe1, Akito Hara1 (1.Tohoku Gakuin Univ.)
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