[16a-4E-1~8] 7.1 X-ray technologies

Wed. Sep 16, 2015 9:00 AM - 11:00 AM 4E (437)

座長:村松康司(兵庫県立大)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:00 AM - 9:15 AM

[16a-4E-1] Characteristics of debris from solid Ar laser plasma for X-ray source

〇Sho Amano¹ (1.Univ.of Hyogo, LASTI)

9:15 AM - 9:30 AM

[16a-4E-2] Development of a compact water window soft x-ray source based on multiply charged ion plasmas

〇(P)Thanh Hung Dinh¹, Yoshiki Kondo², Goki Arai², Taisuke Miura³, Akira Endo³, Tetsuya Makimura⁴, Tadashi Hatano⁵, Takeo Ejima⁵, Takeshi Higashiguchi^1,2 (1.CORE, Utsunomiya Univ., 2.Utsunomiya Univ., 3.HiLASE Centre, 4.Univ. of Tsukuba, 5.IMRAM, Tohoku Univ.)

9:30 AM - 9:45 AM

[16a-4E-3] Development of a table-top water window soft X-ray microscope using laser-produced multiply charged ion plasma light sources

〇(M1)Yoshiki Kondo¹, Thanh-Hung Dinh², Goki Arai¹, Taisuke Miura³, Akira Endo³, Tadashi Hatano⁴, Takeo Ejima⁴, Takeshi Higashiguchi^1,2 (1.Utsunomiya Univ., 2.CORE,Utsunomiya Univ., 3.HiLASE Centre, 4.IMRAM,Tohoku Uni.)

9:45 AM - 10:00 AM

[16a-4E-4] Enhancement of water window soft x-ray emission from highly charged ion plasma by pre-pulse irradiation

〇(M2)goki arai¹, Yoshiki Kondo¹, Thanh-Hung Dinh², Taisuke Miura³, Akira Endo³, Takeshi Higashiguchi^1,2 (1.Utsunomiya Univ., 2.CORE,Utsunomiya Univ., 3.HiLASE Centre)

10:00 AM - 10:15 AM

[16a-4E-5] Development of pulsed CO2 Laser System for Extreme Ultraviolet Lithography

〇Takahiro Tatsumi¹, Krzysztof Nowak¹, Takashi Suganuma¹, Yoshiaki Kurosawa¹, Hiroaki Hamano¹, Yasufumi Kawasuji¹ (1.GIGAPHOTON INC.)

10:15 AM - 10:30 AM

[16a-4E-6] Modeling of fragmentation of the target for laser pumped plasma (LPP) EUV source

〇Akira Sasaki¹, Sunahara Atsushi², Nishihara Katsunobu³ (1.JAEA, 2.ILT, 3.ILE, Osaka Univ.)

10:30 AM - 10:45 AM

[16a-4E-7] Development of short pulse CO₂ laser for efficient EUV sources

〇(M2)Atsushi Sasanuma¹, Reiho Amano¹, Thanh-Hung Dinh², Goki Arai¹, Yusuke Hujii¹, Daisuke Nakamura³, Akihiko Takahashi⁴, Tatsuo Okada³, Taisuke Miura⁵, Akira Endo⁵, Takeshi Higashiguchi^1,2 (1.Utsunomiya Univ., 2.CORE, Utsunomiya Univ., 3.Kyushu Univ. Eng., 4.Kyushu Univ. Med., 5.HiLASE Centre)

10:45 AM - 11:00 AM

[16a-4E-8] Two-temperature conservative radiation hydrodynamic simulation on Laser-irradiated tin plasmas for EUV light source

〇Atsushi Sunahara¹, Yasushi Takeuchi¹, Katsunobu Nishihara², Akira Sasaki³ (1.Inst. Laser Tech., 2.ILE Osaka Univ., 3.APRI JAEA)

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