Microwave-Induced Rapid Heating Used to Crystallize Thin Silicon Films

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

Sun. Sep 13, 2015 9:00 AM - 11:45 AM 1C (135)

座長:河本直哉(山口大),松尾直人(兵庫県立大)

11:15 AM - 11:30 AM

〇(M1)SHUNSUKE KIMURA¹, Kosuke Ohta¹, Tomohiko Nakamura¹, Masahiko Hasumi¹, Ayuta Suzuki², Mitsuru Ushijima², Toshiyuki Sameshima¹ (1.TUAT, 2.TEL)

Keywords:crystallization,amorphous