The 76th JSAP Autumn Meeting, 2015

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[13a-1D-1~11] 15.4 III-V-group nitride crystals

Sun. Sep 13, 2015 8:45 AM - 11:45 AM 1D (141+142)

座長:平山 秀樹(理研),長谷川 繁彦(阪大)

8:45 AM - 9:00 AM

[13a-1D-1] Wafer bonding method for group III nitride semiconductors

〇Ryoji Shinoda1, Yousuke Katsu1, Norikatsu Koide1, Motoaki Iwaya1, Satoshi Kamiyama1, Tetsuya Takeuchi1, Isamu Akasaki1,2 (1.Meijo Univ., 2.Akasaki Research Center)

Keywords:Wafer Bonding