[13a-2S-1~8] 3.15 Silicon photonics

[13a-2S-2] A horizontal metal-Si-metal plasmonic waveguide integrated with Si optical waveguides

〇Hidetaka Nishi^1,2, Tai Tsuchizawa^1,2, Hiraku Toida³, Koji Yamada^1,2, Tsuyoshi Yamamoto² (1.NTT NPC, 2.NTT Device Technology Labs., 3.NTT BRL)

Keywords:plasmonics,Si waveguide

Plasmonic waveguides utilizing narrow gap between metals are intensively researched for application of ultra-dense photonic integrated circuits. We propose that we use Si ,which is a mature material for nanofabrication, as a core with sizes less than diffraction limits. We fabricated a primitive waveguide and confirm that the lightwave is successfully confined in ultrasmall core and propagate with 4 dB/um loss.