[13a-2S-1~8] 3.15 Silicon photonics

[13a-2S-3] Shallow-Grating Coupler for Connecting to Multimode “Optical Pin”

〇Jun Ushida¹, Masatoshi Tokushima¹, Toshinori Uemura¹, Kazuhiko Kurata¹ (1.PETRA)

Keywords:grating coupler,optical pin,Silicon photonics

We designed a highly fabrication-tolerant shallow-grating coupler (GC) connecting to a multimode "optical pin". The structural parameters of the GC to improve upward emitting efficiencies were identified. We also show that the efficiency is robust against the variation of the Silicon-on-Insulator (SOI) thickness and the etching depth of the GC.