11:30 AM - 11:45 AM
[13a-4C-10] Structure analysis of ferroelectric Hf(Si)O by synchrotron XRD
Keywords:ferroelectric,hafnium,Hf
We investigated the crystal structure of ferroelectric Hf(Si)O by in-plane XRD analysis. It was not the mixture state of the antiferroelectric P42/nmc phase and the paraelectric P21/c phase, but the main phase was the ferroelectric Pbc21 phase of a = 5.054 nm, b = 5.231 nm, c = 5.060 nm. Superlattice peak characterized by Pbca regarded as antiferroelectric was not obserbed. The C-V property of the sample was ferroelectric.