The 76th JSAP Autumn Meeting, 2015

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[13a-4C-1~12] 13.3 Insulator technology

Sun. Sep 13, 2015 9:00 AM - 12:15 PM 4C (432)

座長:渡邉 孝信(早大),右田 真司(産総研)

11:00 AM - 11:15 AM

[13a-4C-8] Fabrication and Evaluation of ZrO2/Si Structure using ECR Sputtering

〇Yusuke Sugino1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.Tokyo Univ. of Agri & Tech)

Keywords:High Dielectric Material,Zirconia,Electron Cyclotron Resonance Sputtering