[13p-1B-1~10] Progress of semiconductor wet processing - from silicon to compound -

[13p-1B-3] Human sense, Science & Simulation for Linking Nano-Interface & Macro Behavior

〇Koji Kuroda¹ (1.Kyoto Inst. of Tech.)

Keywords:process control,human sense,science

There is the decisive factor of the frontier field of bio, energy and energy device development, for process control from the nucleation of the nanodomain to the macro-function structure. In other words, development "field control" which causes a ordered nucleus in the heat fluctuated nanodomain, "process adjustment" which induces the expected macrostructure becomes the key of the manufacturing innovation. An original solution will be acquired by the synchronizes fusion of the human sense, scientific measurement and simulation for the manufacturing problem solution.A development models from the nano that fused to macro and, based on experience of the inspection of an unknown engineering element lying hidden in the research and development of the printing company and the analysis center establishment, the spot analysis with the analysis car system and the tradition technology will be presented related to human sense, science and simulation.