The 76th JSAP Autumn Meeting, 2015

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Symposium » Progress of semiconductor wet processing - from silicon to compound -

[13p-1B-1~10] Progress of semiconductor wet processing - from silicon to compound -

Sun. Sep 13, 2015 1:15 PM - 5:45 PM 1B (133+134)

座長:真田 俊之(静岡大)

4:45 PM - 5:00 PM

△ [13p-1B-7] Molecular Dynamics Analysis on the Adsorption Behavior of Water and Alcohol near SiO2 Surface

〇Satoshi Nakaoka1, Yasutaka Yamaguchi1, Masayuki Kawakami2, Daisaku Yano2, Koji Yamanaka2 (1.Osaka Univ., 2.Organo Corp.)

Keywords:molecular dynamics,semiconductor,alcohol