The 76th JSAP Autumn Meeting, 2015

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[13p-1D-1~26] 15.4 III-V-group nitride crystals

Sun. Sep 13, 2015 1:15 PM - 8:15 PM 1D (141+142)

座長:斉藤 真(三菱化学),岡田 成仁(山口大),岩谷 素顕(名城大)

5:00 PM - 5:15 PM

[13p-1D-15] Investigation of surface smoothness of AlN templates on sapphire

〇Syouta Katsuno1, Koudai Hagiwara1, Toshiki Yasuda1, Norikatsu Koide1, Motoaki Iwaya1, Tetsuya Takeuchi1, Satoshi Kamiyama1, Isamu Akasaki1,3, Hiroshi Amano2,3 (1.Meijo Univ., 2.Nagoya Univ., 3.Akasaki Research Center)

Keywords:nitride semiconductor,AlN